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Semiconductor
technology demands constant innovation and ultrahigh-purity materials
from its suppliers.
We are a
long-standing, successful supplier and development partner to this industry.
Needless to say that products made from high-purity fine-grain graphite
and carbon reinforced with carbon fibers meet these requirements. Typical
examples are the development of materials for the new 300 mm/ 12 inches
wafer production process, as well as coatings that enhance the purity
of the next semiconductor generation while extending our materials’
service life at the same time.
- Electrodes
and heating elements for manufacturing high purity quartz glass products
- Heaters
and shields for manufacturing optical fibers
- Blanks
and graphite electrodes for polycrystalline silicon deposition
- Components
made of high purity graphite, carbon/carbon, soft and rigid felt for
crystal growing of silicon, germanium and III/IV composites (e.g. susceptors,
heaters, heat shields, current connecting parts)
- Slicing
beams made of carbon and graphite for cutting monocrystal rods
- Graphite
boats for zone refining of semiconductor materials
- Graphite
boats for reduction heating of germanium oxide
- Graphite
and C/C crucibles and boats for melting high purity metals or semiconductor
materials
- Brushes,
Anodes, Cathodes, Current Collectors, Sliding Contacts, EDM Electrodes,
Resistors, Brazing Tips, Heaters, Seed Holders, Susceptors, Wafer Carriers,
Purified Components, Heaters, Crucibles, Seed Rods, Bolts, Power Connectors,
Diffusion plates
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- SiC-coated
barrel, pancake and single wafer susceptors for ASM, Gemini and LPE
and various other OEMs silicon epitaxy reactors
- Graphite
boats for liquid phase epitaxy (LPE)
- SiC-coated
graphite susceptors for various MOCVD processes
- Single
wafer susceptors for various processes, e.g. rapid therm process (RTP),
low pressure chemical vapor deposition (LPCVD), etc.
- Electrodes,
ion sources (arc chambers) and shields for ion implantation
- Electrodes
(grids) for plasma etching
- Liners
(crucibles) for electron beam evaporation (EBE)
- Brazing
and glass to metal sealing jigs
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